In:
Journal of the Japan Society for Precision Engineering, Japan Society for Precision Engineering, Vol. 62, No. 10 ( 1996), p. 1444-1448
Type of Medium:
Online Resource
ISSN:
1882-675X
,
0912-0289
Uniform Title:
摩擦駆動を応用した光ディスク原盤露光装置用テーブル送り機構の開発
DOI:
10.2493/jjspe.62.1444
Language:
Japanese
,
Japanese
Publisher:
Japan Society for Precision Engineering
Publication Date:
1996
detail.hit.zdb_id:
1021721-6
detail.hit.zdb_id:
2276760-5
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