In:
IEEJ Transactions on Sensors and Micromachines, Institute of Electrical Engineers of Japan (IEE Japan), Vol. 122, No. 8 ( 2002), p. 391-397
Type of Medium:
Online Resource
ISSN:
1341-8939
,
1347-5525
Uniform Title:
シリコン/ガラス構造におけるDeep-RIEプロセスの開発
DOI:
10.1541/ieejsmas.122.391
Language:
English
,
Japanese
Publisher:
Institute of Electrical Engineers of Japan (IEE Japan)
Publication Date:
2002
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