In:
SHINKU, The Vacuum Society of Japan, Vol. 29, No. 4 ( 1986), p. 220-224
Type of Medium:
Online Resource
ISSN:
0559-8516
,
1880-9413
Uniform Title:
Ti/SiO2/TiSi2/Si系におけるTiとSiO2薄膜界面の高温反応 XPSによる研究
Language:
Japanese
Publisher:
The Vacuum Society of Japan
Publication Date:
1986
detail.hit.zdb_id:
2397282-8
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