In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 5, No. 4 ( 1987-07-01), p. 692-693
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1987
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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