In:
The Proceedings of the Symposium on Micro-Nano Science and Technology, Japan Society of Mechanical Engineers, Vol. 2015.7, No. 0 ( 2015), p. _29pm2-F-3-_29pm2-F-3
Type of Medium:
Online Resource
ISSN:
2432-9495
Uniform Title:
29pm2-F-3 FIBとウェットエッチングによるトップダウン加工で作製されたP型Siナノワイヤのピエゾ抵抗効果
DOI:
10.1299/jsmemnm.2015.7._29pm2-F-3
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2015
Permalink