In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 50, No. 12R ( 2011-12-01), p. 120210-
Abstract:
The electron swarm parameters in HSi(OC 2 H 5 ) 3 (triethoxysilane, TRIES) vapor have been investigated for relatively wide ranges of reduced electric field ( E / N ). Based on the arrival-time spectra (ATS) method for electrons using a double-shutter drift tube, the drift velocity and the longitudinal diffusion coefficient were measured for the E / N =20–5000 Td, and the ionization coefficient was obtained for E / N =300–5000 Td. The results were compared with those for SiH 4 and Si(OC 2 H 5 ) 4 (tetraethoxysilane, TEOS), to show characteristics similar to the parameters in TEOS. We also determined the electron collision cross sections for TRIES by means of the Boltzmann equation analysis.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.50.120210
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2011
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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