In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 50, No. 1R ( 2011-01-01), p. 016602-
Abstract:
The authors investigated the effect of scanning-electron-microscope image noise on the accuracy of line-edge-roughness and line-width-roughness (LER/LWR) statistics extracted from power spectral densities (PSDs). To do this, they numerically prepared pseudo-experimental PSDs of LWR using the Monte Carlo (MC) method. The estimation error η decreased with the total number N ALL of width data points in the same way as that observed in the absence of the image noise. η first increased gradually with the image-noise intensity R but markedly when R went beyond the threshold value R th determined by the ratio of the sampling interval Δ y to the correlation length ξ. The PSDs with these R th 's had the same maximum-to-minimum ratio γ (= 10 in this study). The authors approximated η by B N ALL -3/4 (Δ y /ξ) -3/8 [1+ g ( R ,Δ y /ξ,γ)], where B is 49. They also empirically determined the functional form of g ( R ,Δ y /ξ,γ). Because these functions well fitted massive MC simulation results, they provide guidelines for setting up analysis conditions for securing arbitrarily prescribed accuracy.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.50.016602
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2011
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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