In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 49, No. 6S ( 2010-06-01), p. 06GK03-
Abstract:
A tabletop ultra-bright, debris-free femtosecond-laser-driven cluster-based plasma soft X-ray source, which emits more than 10 12 photons/(sr·pulse) in the spectral range 1–10 nm within a 4π sr solid angle was developed. Using such source in combination with a high dynamic range LiF crystal soft X-ray detector allows obtaining contact and propagation-based phase-contrast images of nanostructures with 700 nm spatial resolutions in a wide field of view. It was demonstrated that the high precision of used techniques enable distinguishing inhomogeneity of measured intensities of ultrathin foils in the order of ±3%. All of this opens a new approach for PBPC imaging and metrology of full areas of free-standing or mesh-supported nano-thickness foils, or other nanostructures.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.49.06GK03
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2010
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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