In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 44, No. 1L ( 2005-01-01), p. L95-
Abstract:
The contrast curve of positive and negative electron-beam resists such as polymethylmethacrylate (PMMA), ZEP520A, and hydrogen silsesquioxane (HSQ) at 200 kV electron-beam was estimated by using continuous slow down approximation (CSDA) model with both non-relativistic and relativistic Bethe stopping power. Experimental results show that simple CSDA model well explains the overall response of these various electron-beam resists to high energy electron-beam only if we use the relativistic Bethe stopping power. The difference between non-relativistic and relativistic Bethe stopping power is discussed.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2005
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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