In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 2S ( 1996-02-01), p. 1573-
Kurzfassung:
Behavior of alkoxy-functional [RO-] groups in an atmospheric-pressure chemical vapor deposition (APCVD) reaction using alkoxysilane and ozone is evaluated by alcohol addition. The RO- groups from the alcohol affect the flow characteristics of the APCVD reaction. Formation of a flowing-like profile can be accelerated by increasing the partial pressure of RO- groups in the reaction system when the added RO- groups are of the same size as, or smaller than, the RO- groups of silicon sources. When acceleration occurs, the amount of carbon and hydrogen atoms from RO- groups of added alcohols incorporated in the deposited film increases. Thermal desorption spectroscopy (TDS) shows three states for the carbon incorporated in the deposited film. Water desorption, which is related to the incorporated hydrogen, is also measured. Hydrolysis occurs at the residual terminal groups (i.e., Si–H and Si–OH), which are associated with the flow characteristics.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.1573
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1996
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7
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