In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 5A ( 2000-05-01), p. L420-
Abstract:
The differential thermal analysis-thermogravimetry-mass spectroscopy (DTA-TG-MS) study on the thermal stability of CN x prepared by magnetron sputtering was carried out
under Ar atmosphere . The results show that the decomposition process could be divided into two stages.
One spans from room temperature (RT) to 800°C. The nitrogen loss as well as the weight loss in the a-CN x could be attributed
to the evaporation of C + (m/z=12), CN + (m/z=26), O 2 + (m/z=32), CO 2 + (m/z=44), NO 2 + (m/z=46), and
C 2 N 2 + (m/z=52), as detected by mass spectroscopy. The other is above 800°C, during which the breakage of
C–N bonds and the oxidation of C and N mainly accounts for the weight loss. The weight loss of a-CN x is
7% for the first stage and 42.8% for the second, suggesting the a-CN x to be more stable at low temperature.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.L420
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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