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  • 1
    In: ECS Transactions, The Electrochemical Society, Vol. 75, No. 8 ( 2016-08-18), p. 211-221
    Abstract: Photonic integrated circuits on Si have been attracting much attention and are being intensively investigated. On a Si photonic chip, in addition to the monolithic Si and Ge photonic devices, InP-based active devices can be integrated heterogeneously by utilizing direct-bonding technology. To connect these functional devices, we have proposed back-end photonic wiring using silicon oxynitride (SiO x N y ) -based waveguides. In this paper, we report recent progress in our back-end photonics integration technology. First, back-end SiO x waveguide integration with InP-based membrane active devices will be presented. Then, our technology for the low-loss SiO x N y deposition at low temperature will be presented, which is applied to a SiN waveguide for compact arrayed-waveguide-grating (AWG) filter and Ge integration. These technologies have attributes for future highly integrated photonic circuits on Si.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
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  • 2
    In: ECS Transactions, The Electrochemical Society, Vol. 64, No. 6 ( 2014-08-12), p. 749-759
    Abstract: For practical data communications applications highly-integrated silicon-based photonic devices, we have developed a silicon-germanium-silica monolithic photonic integration platform, on which high-performance silica-based passive devices and compact, high-speed silicon-based dynamic/active devices can be monolithically integrated. In the Si-Ge-silica monolithic integration, it is important to deposit index-controllable silica at a low temperature, so as not to damage the Si- and Ge-based active/dynamic devices. Using this platform, various kind of photonic devices have been integrated on a small silicon ship. On this photonic platform, moreover, high-speed electronic circuits can also be integrated.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2014
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  • 3
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2014-02, No. 35 ( 2014-08-05), p. 1838-1838
    Abstract: Recently, data communication systems are now facing an explosive traffic increase. In order to cope with such an explosive traffic increase, densely-integrated photonic circuits, which would provide compact, high-functionality, energy-efficient and cost-effective network modules, are required. The silicon (Si) photonic platform, which enables monolithic integration of compact photonic devices made of Si and germanium (Ge) on Si wafer, is one of the breakthrough technologies that satisfy these requirements. Waveguide cores on a scale of 100 nm and micrometer-order bending of silicon wire waveguides provide us ultra-compact integrated photonic devices with fast operation speed. However, the hurdles to practical applications of the Si photonic platform are still very high. In middle and long distance applications, for example, photonic devices with a large dynamic range, low optical losses, and low polarization dependence are required. The present Si photonic platform, however, can not provide such high-performance photonic devices. This is because the device performances are extremely sensitive to geometric errors. For example, the geometric tolerance required for passive photonic devices, such as wavelength filters for wavelength division multiplexing (WDM) systems, is far below that of the errors in the present fabrication technology. To overcome these obstacles, we have developed a photonic platform on which Si-, Ge- and silica-based photonic devices are monolithically integrated[1]. Figure 1 shows the conceptual structure of the Si-Ge-silica monolithic photonic platform. On this platform, Si wire waveguides and a Ge layer grown on them are mainly used for dynamic and active devices, which require compactness and high operation speed, while silica waveguides are used for high-performance passive devices. Thanks to the large fabrication tolerance of silica-based waveguide devices, we can build passive decvices with low loss, low crosstalk and low polarization dependece. The silica waveguide can also serve as an interface to external optical fiber. In the Si-Ge-silica monolithic integration, it is important to deposit index-controllable silica at a low temperature so as not to damage active/dynamic devices based on Si and Ge. On this platform, we have developed various photonic devices, such as silica-based arrayed-waveguide-grating wavelength filters (AWG), Si-based electrically-driven modulation devices, and Ge-based photodetectors. The silica-based AWG exhibits high performance in optical loss, crosstalk and polarization dependence. Moreover, the performance of active/dynamic devices has also been improved in order to meet practical applications. For example, the responsivity, frequency bandwidth and polarization-dependent loss of fabricated Ge photodetectors (PDs) are almost comparable to those of indium-phosphide-based high-performance devices. These photonic devices can be monolithically integrated on a Si chip. As an example, Fig. 2 shows an integrated AWG-PD for a 16-channel WDM receiver with a 1.6-nm channel spacing. Inter-channel crosstalk of the device is -22 dB, which is significantly lower than those based on silicon wire waveguides. Each channel works at a data rate of 25 Gbps, and total receiver capacity reaches 400 Gbps. Features of the photonic circuits based on the Si-Ge-silica photonic integration platform are compactness, CMOS compatible fabrication and robustness. The size of the integrated device is typically less than 1-cm square, which can be installed in a small package. The CMOS compatible fabrication process simplifies the assembly processes and reduces fabrication cost. The platform is also endurable against the flip-chip bonding of electronic circuits. For example, we have already mounted 4-channel high-speed electronic amplifiers for PDs on a photonic chip consisting of 4-channel wavelength filters and PDs. Thus, using the Si-Ge-silica monolithic photonic platform, we can construct compact, highly-functional high-density photonic-electronic integration devices for sustainable growth of data communications industries. [1] T. Hiraki et al., IEEE Photonics Journal, vol. 5, 4500407 (2013).
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2014
    detail.hit.zdb_id: 2438749-6
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  • 4
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 30 ( 2016-09-01), p. 1938-1938
    Abstract: Network traffic is continuously increasing, and the global IP traffic reaches 2 zettabytes in 2019 [1]. Photonic integrated circuits on Si-based substrates are highly demanded for coping with increasing telecommunication network traffic and energy consumption in low-cost ways. Particularly, Si and Ge provide modulators and photodetectors in telecom wavelength with a full monolithic way on SOI substrates. In addition, InP provides lightsources based on low-temperature direct-bonding technique. To connect these dynamic and active devices, we propose back-end photonic wiring by using SiO x N y -based waveguides. In this paper, I review recent progress of our work. First, I briefly review our early work; Si-Ge-SiO x integration technology and application to the WDM receiver. To increase integration density, recently, we also have developed a silicon-nitride (SiN) waveguide[1]. SiN has moderately high refractive index and provides moderately small passive devices with tolerance for nonlinear effects. We confirmed 1-dB/cm propagation loss for 1.3-, 1.5-, and 1.6-um wavelength range and applied to a compact and low-loss 16-ch. arrayed-waveguide grating (AWG) filter with 200GHz spacing. In addition, for lightsource integration, a InP-wire waveguide was successfully integrated with the SiO x waveguide via a spot-size converter (SSC) on SiO 2 /Si substrates[2]. The fabricated InP waveguide provides 5.2-dB/cm propagation loss and connected to the SiO x waveguide with a 0.7-dB loss and less than -50-dB reflectance. The InP waveguide can be used as output waveguide for the membrane laser, which utilizes strong optical confinement within the active area to obtain high modulation efficiency and low power consumption[3, 4]. With introducing distributed-reflector (DR) laser structure, the membrane laser exhibits low threshold current of 0.6 mA, output power of 0.7 mW, and 25.8-Gbit/s NRZ direct modulation with 132-fJ/bit energy consumption. In addition, the output InP wire waveguide is successfully integrated with the SiO x waveguide, which exhibits fiber coupling loss of 2.7 dB and low reflectance at the chip facet to obtain sufficient optical output power and stable single-mode operation. [1] K. Okazaki et al., Proc. GFP 2014, Vancouver, paper WP43. [2] H. Nishi et al., IEEE Photonics Journal, vol. 7, pp. 4900308, 2015. [3] S. Matuso et al., J. Lightwave Technol., vol. 33, pp. 1217, 2015. [4] H. Nishi et al., Proc. ECOC 2015, Valencia, paper We.2.5.3.
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
    detail.hit.zdb_id: 2438749-6
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  • 5
    Online Resource
    Online Resource
    Institute of Electrical and Electronics Engineers (IEEE) ; 2014
    In:  IEEE Journal of Selected Topics in Quantum Electronics Vol. 20, No. 4 ( 2014-7), p. 64-70
    In: IEEE Journal of Selected Topics in Quantum Electronics, Institute of Electrical and Electronics Engineers (IEEE), Vol. 20, No. 4 ( 2014-7), p. 64-70
    Type of Medium: Online Resource
    ISSN: 1077-260X , 1558-4542
    RVK:
    Language: Unknown
    Publisher: Institute of Electrical and Electronics Engineers (IEEE)
    Publication Date: 2014
    detail.hit.zdb_id: 2025385-0
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