In:
IEEJ Transactions on Electronics, Information and Systems, Institute of Electrical Engineers of Japan (IEE Japan), Vol. 107, No. 7 ( 1987), p. 648-653
Type of Medium:
Online Resource
ISSN:
0385-4221
,
1348-8155
Uniform Title:
STMによる精密三次元表面計測
DOI:
10.1541/ieejeiss1987.107.7_648
Language:
English
,
Japanese
Publisher:
Institute of Electrical Engineers of Japan (IEE Japan)
Publication Date:
1987
detail.hit.zdb_id:
2218976-2
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