In:
Chinese Journal of Chemical Physics, AIP Publishing, Vol. 24, No. 6 ( 2011-12-01), p. 729-734
Abstract:
Mo(CO)6 adsorption on the clean, oxygen-precovered and deeply oxidized Si(111) surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo(CO)6 illustrates that different interactions of adsorbed Mo(CO)6 occur on clean Si(111) and SiO2/Si(111) surfaces, weak on the former and strong on the latter. The strong interaction on SiO2/Si(111) might lead to the partial dissociation of Mo(CO)6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo(CO)6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si(111) surface but not on the clean Si(111) surface. A portion of the deposited metallic molybdenum is transformed into the MoO3 on the SiO2/Si(111) surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.
Type of Medium:
Online Resource
ISSN:
1674-0068
,
2327-2244
DOI:
10.1088/1674-0068/24/06/729-734
Language:
English
Publisher:
AIP Publishing
Publication Date:
2011
detail.hit.zdb_id:
2381472-X
SSG:
6,25
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