In:
Microelectronic Engineering, Elsevier BV, Vol. 9, No. 1-4 ( 1989-5), p. 547-550
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/0167-9317(89)90117-2
Language:
English
Publisher:
Elsevier BV
Publication Date:
1989
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7