Abstract
A collisional-radiative model was used to study the kinetics of an atmospheric pressure helium discharge. The electron kinetics was obtained from a two-term solution of the Boltzmann equation with electron–electron collisions included. The distribution of the helium electronic excited states was compared to measured values and used to calculate excitation temperatures. The results show that a unique value of the excitation temperature cannot be used to characterize the whole electronic states distribution, because the plasma is not in local thermodynamical equilibrium under the conditions considered. Other calculated discharge parameters, such as the electron temperature, the maintenance electric field, the density of metastable atoms in the 2 3 S state, and the ion densities are presented and compared to experimental data when available.
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REFERENCES
A. T. Zander and G. M. Hieftje, Appl. Spectrosc. 35, 327 (1981).
C. Trassy and J. mermet, Les Applications Analytiques des Plasmas HF (Lavoisier Technique & Documentation, Paris, 1984).
V. Fassel, Science 202, 183 (1978).
S. Greenfield, H. McD. McGeachin, and P. B. Smith, Talanta 23, 1 (1976).
J. Hubert, R. Sing, D. Boudreau, K. C. Tran, C. Lauzon, and M. Moisan, in Microwave Discharges: Fundamentals and Applications, C. M. Ferreira and M. Moisan, eds. (Plenum, New York, 1993), pp. 509–530.
F. A. Serravallo and T. H. Risby, Anal. Chem. 47, 2141 (1975).
S. A. Estes, P. C. Uden, and R. M. Barnes, Anal. Chem. 53, 1829 (1981).
S. R. Koirtyohann, Anal. Chem. 55, 374 (1983).
J. P. J. Van Dalen, P. A. de Lesenne Coulander, and L. de Galan, Anal. Chim. Acta 94, 1 (1977).
D. Boudreau, C. Laverdure, and J. Hubert, Appl. Spectrosc. 43, 456 (1989).
P. Brassem, F. J. M. J. Maessen, Spectrochim. Acta 29B, 203 (1974).
R. Avni and J. D. Winefordner, Spectrochim. Acta 30B, 281 (1975).
P. Brassem, F. J. M. J. Maessen, and L. de Galan, Spectrochim. Acta 33B, 753 (1978).
L. L. Alves, G. Gousset, and C. M. Ferreira, J. Phys. D 25, 1713 (1992).
J. Margot and M. Moisan, in NATO ASI on Plasma Processing of Semiconductors, Series E, Vol. 336, P. F. Williams, ed. (Kluwer, 1997), pp. 187–210.
K. C. Tran, M.Sc. Thesis, Université de Montréal, Montréal, Canada (1995).
J. Margot and M. Moisan, J. Plasma Phys. 49, 357 (1993).
T. Holstein, Phys. Rev. 72, 1212 (1947).
T. Holstein, Phys. Rev. 83, 1159 (1951).
P. J. Walsh, Phys. Rev. 116, 511 (1959).
J. W. Mills and G. M. Hieftje, Spectrochim. Acta 39B, 859 (1984).
L. L. Alves and C. M. Ferreira, J. Phys. D. 24, 581 (1991).
C. M. Ferreira and J. Loureiro, J. Phys. D. 17, 1175 (1984).
C. M. Ferreira, in NATO ASI on Nonequilibrium Processes in Partially Ionized Gases, M. Capitelli and J. N. Bardsley, eds., Series B, Vol. 220 (Plenum, New York, 1990), pp. 187–212.
S. D. Rockwood, Phys. Rev. A 8, 2348 (1973).
S. Lévesque, M.Sc. Thesis, Université de Montréal, Montréal, Canada (1991).
J. M. Pouvesle and J. Stevefelt, J. Chem. Phys. 82, 2274 (1985).
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Pérès, I., Alves, L.L., Margot, J. et al. Calculated Plasma Parameters and Excitation Spectra of High-Pressure Helium Discharges. Plasma Chemistry and Plasma Processing 19, 467–486 (1999). https://doi.org/10.1023/A:1021878309471
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DOI: https://doi.org/10.1023/A:1021878309471