Note: Front Cover -- Backscattering Spectrometry -- Copyright Page -- Table of Contents -- Dedication -- Preface -- Acknowledgments -- Chapter 1. Introduction -- 1.1 Introduction -- 1.2 Concept of a Backscattering Experiment and Its Layout -- 1.3 Basic Physical Processes -- 1.4 Examples and Applications -- 1.5 Strengths and Weaknesses of Backscattering Spectrometry -- 1.6 How to Read a Backscattering Spectrum -- 1.7 Book Outline -- References -- Chapter 2. Basic Physical Concepts -- 2.1 Introduction -- 2.2 Kinematic Factor K -- 2.3 Scattering Cross Section σ -- 2.4 Energy Loss and Stopping Cross Section -- 2.5 Linear Additivity of Stopping Cross Sections (Bragg's Rule) -- 2.6 Energy Straggling -- 2.7 Linear Additivity of Energy Straggling -- References -- Chapter 3. Concepts of Backscattering Spectrometry -- 3.1 Introduction -- 3.2 Depth Scale for an Elemental Sample -- 3.3 Energy E before Scattering -- 3.4 Numerical Methods to Find the Energy E before Scattering -- 3.5 Height of an Energy Spectrum for an Elemental Sample -- 3.6 Depth Scale for a Homogeneous Solid Containing More Than One Element (Compound Sample) -- 3.7 Height of an Energy Spectrum for a Homogeneous Solid Containing More Than One Element (Compound Sample) -- 3.8 High-Energy Edge of an Energy Spectrum for an Elemental Sample with Several Isotopes -- 3.9 Energy Loss and Yield Respond to Atoms per Unit Area -- 3.10 Numerical Methods to Compute Backscattering Spectra -- References -- Chapter 4. Backscattering Spectrometry of Thin Films -- 4.1 Introduction -- 4.2 Energy Spectrum of a Thin Elemental Film -- 4.3 Energy Spectrum of Multilayered Elemental Films -- 4.4 Energy Spectrum of a Homogeneous Thin Film Containing More Than One Element (Compound Film) -- 4.5 Energy Spectrum of Multilayered Films Containing More Than One Element (Layered Compound Films). , 4.6 Influence of Energy Straggling and System Resolution -- References -- Chapter 5. Examples of Backscattering Analysis -- 5.1 Introduction -- 5.2 Surface Impurity on an Elemental Bulk Target -- 5.3 Elemental Samples Containing Uniform Concentrations of Impurities -- 5.4 Composition of Homogeneous Samples Containing More Than One Element -- 5.5 Impurities Distributed in Depth in an Elemental Sample -- 5.6 Thickness of Thin Films -- References -- Chapter 6. Instrumentation and Experimental Techniques -- 6.1 Introduction -- 6.2 Accelerator -- 6.3 Energy Stabilization System -- 6.4 Energy Calibration -- 6.5 The Vacuum System -- 6.6 Beam Definition and Measurement -- 6.7 Backscattering Beam Energy Analysis -- 6.8 Sample Holders -- References -- Chapter 7. Influence of Beam Parameters -- 7.1 Introduction -- 7.2 Mass Resolution -- 7.3 Accessible Depth -- 7.4 Depth Resolution at Normal Incidence -- 7.5 Depth Resolution at Glancing Incidence -- 7.6 Sensitivity to Detection of Surface Impurities -- 7.7 Low-Energy Tails -- 7.8 Non-Rutherford Scattering, Nuclear Reactions, and Detection of Low-Mass Impurities -- 7.9 Microscopic Beam and Nonuniform Layers -- References -- Chapter 8. Use of Channeling Techniques -- 8.1 Introduction -- 8.2 Crystal Alignment Procedures -- 8.3 Perfect Crystal -- 8.4 Lattice Disorder Amorphous Layers and Polycrystalline Films -- 8.5 Flux Peaking and Lattice Site Location of Impurities -- 8.6 Influence of the Analysis Film -- References -- Chapter 9. Energy-Loss Measurements -- 9.1 Introduction -- 9.2 Extraction of ε Values from [ε] Measurements -- 9.3 Measurement of [ε] from Thin-Film Data -- 9.4 Determination of [ε] from Signal Height -- References -- Chapter 10. Bibliography on Applications of Backscattering Spectrometry -- 10.1 Introduction -- 10.2 Surfaces -- 10.3 Bulk Properties -- 10.4 Oxide and Nitride Layers. , 10.5 Deposited and Grown Layers -- 10.6 Thin-Film Reactions -- 10.7 Ion Implantation in Metals -- 10.8 Ion Implantation in Semiconductors -- 10.9 Hydrogen and Helium in Metals -- 10.10 Sputtering and Blistering Processes -- 10.11 Microbeams and Other Applications -- Appendix A: Transformation of the Rutherford Formula from Center of Mass to Laboratory Frame of Reference -- Appendix B: Influence of Energy Straggling on a Thin-Film Spectrum -- Appendix C: The True Position of the Edges of a Narrow Rectangular Signal -- Appendix D: List of Energy-Loss Complications -- Appendix E: Rough Targets -- Appendix F: Numerical Tables -- Indexes.