In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 5B ( 1994-05-01), p. L718-
Abstract:
Y–Ba–Cu–O superconducting thin film was grown on the SrTiO 3 substrate by in situ 90°-off-axis rf magnetron sputtering under the low oxygen partial pressure of 0.67 Pa (5 mTorr) from different targets with various Ba/Y ratios. All films were grown at 645°C with their c -axis normal to the substrate surface. The critical temperature and c -axis length approached the optimum values as the Ba/Y ratio of the target decreased from 2 to 1. In addition, the effect of the oxygen pressure during cooling after deposition on the critical temperature and the c -axis length of the thin films was determined.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.L718
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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