In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 52, No. 10S ( 2013-10-01), p. 10MC10-
Abstract:
A micro-fabricated bridge sensor for determining minute magnetic field variation is proposed. A micro-bridge with 100×400 µm 2 dimensions (width × length) comprises a multi-layered structure of Tb 0.3 Dy 0.7 Fe 1.9 /SiO 2 /Pt/PbZr 0.52 Ti 0.48 O 3 /Pt/Ta on a SiN x supporting layer. We observed the limit of detection under small DC magnetic field as 1×10 -11 T which was converted electrically to 77 µV with a 5 µV noise floor via elastic coupling between magnetostrictive and piezoelectric thin film. The magnetoelectric (ME) voltage was linearly proportional to small magnetic field variance, and the experimental ME coefficient was measured as 9.9 V/(cm·Oe).
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.7567/JJAP.52.10MC10
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2013
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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