In:
Journal of Applied Physics, AIP Publishing, Vol. 52, No. 3 ( 1981-03-01), p. 1285-1288
Abstract:
The power dependence of the emission intensities for the species Si, SiH, H, H2, and added N2 in the rf glow discharge decomposition of silane (SiH4) was studied. It was found that H and the emitting excited states of Si and SiH are primary products of the silane decomposition.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1981
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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