In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 29, No. 8 ( 2023-08), p. 1189-1196
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-023-05498-7
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2023
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X
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