In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 12, No. 1 ( 2002-01-01), p. 82-86
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/0960-1317/12/1/313
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2002
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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