In:
International Journal of Engineering & Technology, Science Publishing Corporation, Vol. 7, No. 3.11 ( 2018-07-21), p. 6-
Abstract:
Zinc oxide (ZnO) nanostructures were synthesized via thermal chemical deposition (TCVD) method and applied as the sensing membrane of an extended-gate field effect transistor (EGFET) pH sensor. The ZnO nanostructures undergone a post-deposition heat treatment with the temperature ranging from 200-500 °C for 15 min in air ambient. The influence of the post-deposition heat treatment on the physical and pH sensing characteristics was investigated. The FESEM images showed that the surface morphology of the samples were dependent on post-annealing treatment. The as-deposited sample showed the biggest grain size and non-uniformed structures. Applying the post-annealing heat treatment caused the surface morphology to become denser and uniform. The most ideal temperature for the heat treatment for EGFET pH sensor application was found at 300 °C resulting in a pH sensitivity of 48.2 mV/pH with 0.9646 linearity.
Type of Medium:
Online Resource
ISSN:
2227-524X
DOI:
10.14419/ijet.v7i3.11
DOI:
10.14419/ijet.v7i3.11.15919
Language:
Unknown
Publisher:
Science Publishing Corporation
Publication Date:
2018
detail.hit.zdb_id:
2661563-0
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