In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 31, No. 4 ( 2022-8), p. 690-699
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2022.3183021
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2022
detail.hit.zdb_id:
2027726-X
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