In:
Journal of Applied Physics, AIP Publishing, Vol. 66, No. 10 ( 1989-11-15), p. 4577-4580
Abstract:
Depth profiles of Hg+, Hg2+, and Hg3+ implanted in polymer polyvinylalcohol at energies from 50 to 600 keV are measured by 2.1-MeV 4He2+ Rutherford backscattering. Based on Biersack’s angular diffusion model, a computer program is written for comparison with the experimental values. The result shows that the measured projected range is in good agreement with the calculated value for first-order treatment. The experimentally determined range straggling is still higher than the calculated value after considering the second-order energy loss. The Monte Carlo simulation shows that the Hg profile is not described by an ionization or nuclear damage profile, but rather is described by a classical predicted implantation profile.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1989
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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