In:
Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 46, No. 11 ( 1997), p. 2206-
Abstract:
In this paper, textured (100) diamond films are successfully grown on single crystalline (100) silicon substrate by bias enhanced hot filament chemical vapor deposition from a gas mixture of methane and hydrogen. The films show the well defined facet and are identified to be textured films by means of scanning electron microscopy, Raman spectroscopy and X-ray diffraction analysis. The effects of various parameters have been systematically investigated and the optimum conditions of films growth have been obtained.
Type of Medium:
Online Resource
ISSN:
1000-3290
,
1000-3290
Language:
Unknown
Publisher:
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Publication Date:
1997
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