In:
KOBUNSHI RONBUNSHU, Society of Polymer Science, Japan, Vol. 65, No. 3 ( 2008), p. 273-276
Type of Medium:
Online Resource
ISSN:
0386-2186
,
1881-5685
Uniform Title:
イオンビーム照射ポリフッ化ビニリデン薄膜のエッチング挙動— エッチング前処理・照射イオン効果の検討
DOI:
10.1295/koron.65.273
Language:
Japanese
,
Japanese
Publisher:
Society of Polymer Science, Japan
Publication Date:
2008
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